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# Ian Robinson <ikr@uiuc.edu>
# requesting 6 days, at minimum=3 days
# beamline 34ID, "Cu damascene microstructure"
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# top:/home/www/beamtime-requests/req00407.txt
# UNICAT Member Beam Time Request  #407
# created Wed Mar 19 15:30:20 CST 2003
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beamline:
	34ID

collaboration:
	Yes

contact:
	ikr@uiuc.edu

days:
	6

description:
	Electoplated Cu wires will be formed in 1 micron trenches on prefabricated Si wafers.  The confinement into trenches is expected to modify the grain shapes and sizes of the Cu.  We wish to look at the texture on the wafers as a function of position.  This requires focussing: the KB mirror system can produce a 1 micron probe.

equipment+required:
	KB mirrors.  Should be scheduled in series with other mirror expts.

experiment:
	Cu damascene microstructure

foreign+nationals:
	

hazards:
	All samples are already fabricated by A. Gewirth's group at UIUC.
	They are slightly unstable and must be kept cold (~0C) prior to use.  We will need access to sample refrigerator.

minimumdays:
	3

name:
	Ian Robinson

new+request:
	on

nonmembers:
	

unacceptable+dates:
	Can only be there before June 15.


#REMOTE_HOST: robinsonpc.mrl.uiuc.edu
#REMOTE_ADDR: 130.126.102.115
#CONTENT_LENGTH: 858
#HTTP_REFERER: http://www.uni.aps.anl.gov/unireq.htm
#HTTP_USER_AGENT: Mozilla/4.0 (compatible; MSIE 5.01; Windows NT 5.0)